a three-layer sandwich of a metal, an insulator (usually an oxide of the substrate), and a semiconductor substrate, used in integrated circuits.
Abbreviation: MOS.
Also, metal-oxide semiconductor.
metal oxide semiconductor in Technology
electronics (MOS) The three materials used to form a gate in the most common kind of Field Effect Transistor - a MOSFET. [Other MOS devices?] (1996-05-27)